The authors managed to combine in one device all the advantages of the different approaches to modern nano measurements: probe scanning microscopy (surface analysis and physical parameters of the object), optical Microspectroscopy (chemical mapping and the determination of the optical properties), and also nanotomography (accurate 3D imaging of the internal structure of the object on the basis of several x-ray images). This combination of methods can, in addition tot’n high-quality 3D images of nanoscale regions of the material, in order to write in these areas, the spatial distribution of its mechanical, electrical, optical and chemical properties (e. e. elasticity, conductivity, magnetization).
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